Study on Wet Etching of AAO Template

Guofeng Hu, Haiming Zhang, Wenwen Di, Tingting Zhao

Abstract


The highly ordered anodic aluminum oxide (AAO) template was prepared with two-step anodization. The AAO
template was carried out wet etching process using a mixture of phosphoric acid and chromic acid, NaOH, and H3PO4
solutions. The relationship between mass loss of AAO template and etching time was studied. The results indicate that 3
wt % H3PO4 solution is a more mild and effective etchant comparing with these etchants, and the mass loss is linear
with etching time. SEM investigations show that alumina nanowires were obtained with high yield by etching AAO
template. And, the growth of alumina nanowires was closely related to the etching time.

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Applied Physics Research   ISSN 1916-9639 (Print)   ISSN 1916-9647 (Online)

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