Synthesis and Some Properties of Metal Organic Chemical Vapour Deposited Lithium Chromium Oxide Thin Films

Abstract

Thin Films of Lithium Chromium Oxide were deposited on soda lime glass substrates at a temperature of 420 °C by the pyrolysis of a mixture of Lithium Hydroxide and Chromium Acetylacetonate (1:2), using Metal Organic Chemical Vapour Deposition technique. The prepared thin films were characterized by using Rutherford Backscattering (RBS), X-Ray Diffraction (XRD) and Ultraviolet-Visible Spectrophotometry. Using RBS the ratio of Li:Cr:O in the prepared thin films was found to be 36:18:46, leading to a stoichiometry of Li₂CrO_2+? (? = 0.5). A direct allowed bandgap of 3.58 eV was obtained from the UV-Visible spectrum, with a blank soda lime glass substrate in the path of the reference beam.