Simple Method for Phosphorus Diffusion on <100> Oriented P-Type Silicon Using New Phosphorus Gel as Dopant


  •  D. Kobor    
  •  R. Ndioukane    
  •  O. Palais    
  •  M. Touré    
  •  A. K. Diallo    
  •  N. C. Y. Fall    
  •  M. Biagui    

Abstract

In this work, we try to make a p-type monocristalline silicon pn junction using an easier doping method. We combined spin-coating thin film deposition method and solid doping technique. This technique can be considered as variety of the SOD method.

In this study, phosphorous-based gel compounds was prepared and deposited by spin coating. Heat treatment would thus, after deposition of thin layer, diffuse phosphorus atoms into the substrate to obtain a pn diode. Study by Secondary Ions Mass Spectrometry (SIMS) showed a surface phosphorus concentration of 1020 at/cm3 incorporated within the silicon substrate to a depth of 300 nm. The microwave phase-shift (µW-PS) technique is used to determine the bulk lifetime (tb) of minority carriers. In this technique, the phase-shift between a microwave beam (10 GHz) and a sine-modulated infrared excitation is related to tb and to the surface recombination velocity (S) (Palais, Clerc, Arcari, Stemmer & Martinuzzi, 2003). The lifetime tb mean values vary from 7 µs for a p-type Silicon to 97 µs for phosphorus-diffused silicon. The surface recombination velocity S varies from around 500 to 1000 cm.s-1.



This work is licensed under a Creative Commons Attribution 4.0 License.
  • ISSN(Print): 1916-9639
  • ISSN(Online): 1916-9647
  • Started: 2009
  • Frequency: semiannual

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