Abstract

Hot cathode and hollow anode argon DC glow discharge plasma at different pressures of (0.04, 0.05, 0.06, 0.07, 0.09, 0.2, 0.4, and 0.8 mbar) has been investigated. The experiments were carried out under the influence of pressure and filament cathode current on voltage – current characteristics of glow discharge and its breakdown voltage. Plasma parameters have been measured and obtained using single probe method at fixed discharge current (I_d=1.88 mA) and hollow anode diameter. A computer MATLAB program is performed for this purpose. It was shown that the discharge voltage – current characteristics curve has a positive resistance and represents an abnormal glow region at pressure (0.04 and 0.06) mbar for different filament current. The breakdown voltage increases as the filament current is increased. In different pressure, electron temperature shows different behavior with increasing filament current. Electron density varies nearly inversely with the filament current, but it is increase due to increase of pressure from (1 to 3 mbar), then tends to decrease for the higher pressure. There are two groups of electrons according to the two peaks of (EEDFs), and the peaks amplitude decrease, with the increases of both filament current and gas pressure.

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